Multilayer soft lithography

Multilayer soft lithography (MSL) is a fabrication process in which microscopic chambers, channels, valves and vias are molded within bonded layers of elastomer.^[1]

Commercial PDMS stamps can mold materials such as optical adhesive in a sequential process to create the bonded layers.

References

^ Unger, Marc A.; Chou, Hou-Pu; Thorsen, Todd; Scherer, Axel; Quake, Stephen R. (2000-04-07). "Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography". Science. 288 (5463): 113–116. Bibcode:2000Sci...288..113U. doi:10.1126/science.288.5463.113. ISSN 0036-8075. PMID 10753110.

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[1] Unger, Marc A.; Chou, Hou-Pu; Thorsen, Todd; Scherer, Axel; Quake, Stephen R. (2000-04-07). "Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography". Science. 288 (5463): 113–116. Bibcode:2000Sci...288..113U. doi:10.1126/science.288.5463.113. ISSN 0036-8075. PMID 10753110.

[1]

v t e Nanolithography
Main	Optical Electron beam Nanoimprint Multiphoton Scanning probe
Other	Molecular self-assembly Stencil X-ray Ion beam Magnetolithography Plasmonic Soft Laser printing Nanosphere Proton beam
See also	Nanotechnology Nanoelectronics

Multilayer soft lithography

See also

References

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